Realization of a phase shifting interferential microscope and its application to the high resolution profilometry
Document title: Realization of a phase shifting interferential microscope and its application to the high resolution profilometry
Journal: Instrumentation & development
Database: PERIÓDICA
System number: 000021146
ISSN: 0187-8549
Authors: 1
Institutions: 1Universidad Simón Bolívar, División de Ciencias Físicas y Matemáticas, Caracas, Distrito Federal. Venezuela
Year:
Volumen: 3
Number: 4
Pages: 53-58
Country: México
Language: Inglés
Document type: Artículo
Approach: Analítico
Disciplines: Física y astronomía,
Ingeniería
Keyword: Optica,
Ingeniería de instrumentos,
Perfilometria,
Corrimiento de fase,
Metrología,
Microscopio interferencial
Keyword: Physics and astronomy,
Engineering,
Optics,
Instrumentation engineering,
Profilometry,
Phase shifting,
Optic metrology,
Interferential microscope
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