| Revista: | Superficies y vacío |
| Base de datos: | PERIÓDICA |
| Número de sistema: | 000404893 |
| ISSN: | 1665-3521 |
| Autores: | Jiménez Pérez, J.L1 Sakanaka, P.H2 Algatti, M.A3 Cruz Orea, A4 Mendoza Alvarez, J.G4 Muñoz Aguirre, N5 |
| Instituciones: | 1Instituto Politécnico Nacional, Centro de Investigación en Ciencia Aplicada y Tecnología Avanzada, México, Distrito Federal. México 2Universidade Estadual de Campinas, Instituto de Fisica "Gleb Wataghin", Campinas, Sao Paulo. Brasil 3Universidade Estadual Paulista "Julio de Mesquita Filho", Departamento de Fisica e Quimica, Guaratingueta, Sao Paulo. Brasil 4Instituto Politécnico Nacional, Centro de Investigación y de Estudios Avanzados, México, Distrito Federal. México 5Instituto Mexicano del Petróleo, México, Distrito Federal. México |
| Año: | 2003 |
| Periodo: | Jun |
| Volumen: | 16 |
| Número: | 2 |
| Paginación: | 19-22 |
| País: | México |
| Idioma: | Inglés |
| Tipo de documento: | Artículo |
| Enfoque: | Analítico |
| Resumen en inglés | Based on a previous developed and published one-dimensional model for the growth of metallic oxide thin films, we have studied the tridimensional growth rates for titanium dioxide films grown on Ti layers. The thermo-oxidation process of Ti films, deposited over glass substrates, is due to the film surface heating occurring when an intense beam of a pulsed Nd:YAG laser moves at constant speed on the surface exposed to air. The computational algorithm used for the calculations in this model takes into account self-consistently the heat flux equation, the Gaussian-shape laser beam, and the parabolic oxidation law starting with the initial values of the heating parameters. From these calculations we obtained a tridimensional picture of film morphology. The theoretical estimations of the film thickness and the growth ratio show excellent agreement with the measured experimental values |
| Disciplinas: | Física y astronomía, Ingeniería |
| Palabras clave: | Física de materia condensada, Ingeniería de materiales, Estado sólido, Películas delgadas, Dióxido de titanio, Laser Nd:YAG |
| Keyword: | Physics and astronomy, Engineering, Condensed matter physics, Materials engineering, Solid state, Thin films, Titanium dioxide, Nd:YAG laser |
| Texto completo: | Texto completo (Ver PDF) |
