Numerical study of oxide thin film growth by using Nd:YAG laser beam



Título del documento: Numerical study of oxide thin film growth by using Nd:YAG laser beam
Revista: Superficies y vacío
Base de datos: PERIÓDICA
Número de sistema: 000404893
ISSN: 1665-3521
Autores: 1
2
3
4
4
5
Instituciones: 1Instituto Politécnico Nacional, Centro de Investigación en Ciencia Aplicada y Tecnología Avanzada, México, Distrito Federal. México
2Universidade Estadual de Campinas, Instituto de Fisica "Gleb Wataghin", Campinas, Sao Paulo. Brasil
3Universidade Estadual Paulista "Julio de Mesquita Filho", Departamento de Fisica e Quimica, Guaratingueta, Sao Paulo. Brasil
4Instituto Politécnico Nacional, Centro de Investigación y de Estudios Avanzados, México, Distrito Federal. México
5Instituto Mexicano del Petróleo, México, Distrito Federal. México
Año:
Periodo: Jun
Volumen: 16
Número: 2
Paginación: 19-22
País: México
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Analítico
Resumen en inglés Based on a previous developed and published one-dimensional model for the growth of metallic oxide thin films, we have studied the tridimensional growth rates for titanium dioxide films grown on Ti layers. The thermo-oxidation process of Ti films, deposited over glass substrates, is due to the film surface heating occurring when an intense beam of a pulsed Nd:YAG laser moves at constant speed on the surface exposed to air. The computational algorithm used for the calculations in this model takes into account self-consistently the heat flux equation, the Gaussian-shape laser beam, and the parabolic oxidation law starting with the initial values of the heating parameters. From these calculations we obtained a tridimensional picture of film morphology. The theoretical estimations of the film thickness and the growth ratio show excellent agreement with the measured experimental values
Disciplinas: Física y astronomía,
Ingeniería
Palabras clave: Física de materia condensada,
Ingeniería de materiales,
Estado sólido,
Películas delgadas,
Dióxido de titanio,
Laser Nd:YAG
Keyword: Physics and astronomy,
Engineering,
Condensed matter physics,
Materials engineering,
Solid state,
Thin films,
Titanium dioxide,
Nd:YAG laser
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