Effects of temperature and deposition time on the RF- sputtered CdTe films preparation
Título del documento: Effects of temperature and deposition time on the RF- sputtered CdTe films preparation
Revista: Superficies y vacío
Base de datos: PERIÓDICA
Número de sistema: 000377868
ISSN: 1665-3521
Autores: 1
1
1
2
2
Instituciones: 1Benemérita Universidad Autónoma de Puebla, Centro de Investigación en Dispositivos Semiconductores, Puebla. México
2Instituto Politécnico Nacional, Centro de Investigación y de Estudios Avanzados, Mérida, Yucatán. México
Año:
Periodo: Mar
Volumen: 27
Número: 1
Paginación: 15-19
País: México
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Experimental, aplicado
Resumen en inglés In this work, CdTe thin films were deposited by rf-sputtering at different substrate temperatures (room temperature (RT), 100, 150, 200, and 250 °C) and deposition times (30, 60, and 90 min). The applied power and vacuum pressure were maintained fixed for all depositions. A mean value of 18.5 nm/s on the deposition rate was maintained for films deposition. The surface morphology, rms-roughness, and grain size of the sputtered-films were obtained from atomic force microscopy and scanning electron microscopy images for comparison. CdTe films deposited during 60 min presented high reproducibility, because their consistent thickness value (1.2 μm) at different substrate temperatures. Higher thickness than 1.81 μm was obtained for films deposited at 250 °C and 90 min. CdTe films deposited at 150 °C present minor dispersion on thickness, while rms-roughness increased with the increase of substrate temperature but only for films deposited at 60 and 90 min. CdTe film deposited at 250 °C during 90 min was selected as appropriate for CdS/CdTe solar cells preparation
Disciplinas: Ingeniería
Palabras clave: Ingeniería de materiales,
Ingeniería química,
Telururo de cadmio,
Películas delgadas,
Pulverización catódica
Keyword: Engineering,
Chemical engineering,
Materials engineering,
Cadmium telluride,
Thin films,
Magnetron sputtering
Texto completo: Texto completo (Ver HTML)