AISI 304 nitriding by PIII in DC toroidal plasmas



Document title: AISI 304 nitriding by PIII in DC toroidal plasmas
Journal: Superficies y vacío
Database: PERIÓDICA
System number: 000405033
ISSN: 1665-3521
Authors: 1
2
1
1
1
2
Institutions: 1Instituto Nacional de Investigaciones Nucleares, Laboratorio de Física de Plasmas, México, Distrito Federal. México
2Instituto Tecnológico de Toluca, Departamento de Electrónica, Toluca, Estado de México. México
Year:
Season: Mar
Volumen: 17
Number: 1
Pages: 17-20
Country: México
Language: Inglés
Document type: Artículo
Approach: Analítico
English abstract Recent results obtained from the Plasma Immersion Ion Implantation (PIII) nitriding process on AISI 304 stainless steel by means of a DC toroidal plasma source of 0.23m and 0.08m major and minor radii, respectively, are reported. Among the main plasma parameters, electron densities in the range 1-4×109 cm-3 were established at an electron temperature between 0.5 and 2 eV. Nitrogen ions were extracted from the plasma and implanted in the steel substratum by means of a high voltage negative modulator operated at 5 kV, with 50 µs long pulses and a 1 kHz rate. This technology has achieved increments in the steel Vickers microhardness between 500 and 700 units at a 15 g load, according to the gas pressure. X ray diffraction (XRD) pattern confirmed the presence of the γN phase as a result of the nitriding process. Scanning Electronic Microscopy (SEM) indicated a 20 at.% increment in the nitrogen content of the implanted samples
Disciplines: Física y astronomía,
Ingeniería
Keyword: Física de materia condensada,
Teoría cinética y plasmas,
Ingeniería de materiales,
Superficies,
Nitruración,
Acero inoxidable,
Implantación de iones
Keyword: Physics and astronomy,
Engineering,
Condensed matter physics,
Kinetic theory and plasma,
Materials engineering,
Surfaces,
Nitriding,
Stainless steel,
Ion implantation
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