The effect of extrinsic contamination on ion implantation gettering
Document title: The effect of extrinsic contamination on ion implantation gettering
Journal: Revista mexicana de física
Database: PERIÓDICA
System number: 000017410
ISSN: 0035-001X
Authors: 1
Institutions: 1Instituto Nacional de Astrofísica, Optica y Electrónica, Tonantzintla, Puebla. México
Year:
Season: Dic
Volumen: 41
Number: 6
Pages: 897-904
Country: México
Language: Inglés
Document type: Artículo
Approach: Analítico
Disciplines: Física y astronomía
Keyword: Física de materia condensada,
Semiconductores,
Implantación de iones,
Recombinacion-portadores
Keyword: Physics and astronomy,
Condensed matter physics,
Semiconductors,
Ion implantation,
Carrier recombination,
Extrinsic contamination
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