Deposicao de silicio com elevado grau de pureza a partir do triclorosilano
Document title: Deposicao de silicio com elevado grau de pureza a partir do triclorosilano
Journal: Metalurgia ABM
Database: PERIÓDICA
System number: 000073456
ISSN: 0026-0983
Authors: 1
Institutions: 1Universidade Estadual de Campinas, Campinas, Sao Paulo. Brasil
Year:
Season: Mar
Volumen: 37
Number: 280
Pages: 139-143
Country: Brasil
Document type: Artículo
Approach: Experimental, aplicado
Disciplines: Ingeniería
Keyword: Ingeniería metalúrgica,
Alta pureza,
Deposición,
Silicio,
Triclorosilano
Keyword: Engineering,
Metallurgical engineering,
Deposition,
High purity,
Silicon,
Trichlorosilane
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