Pulsed Power Modulators for Surface Treatment by Plasma Immersion Ion Implantation



Document title: Pulsed Power Modulators for Surface Treatment by Plasma Immersion Ion Implantation
Journal: Brazilian journal of physics
Database: PERIÓDICA
System number: 000248460
ISSN: 0103-9733
Authors: 1

Institutions: 1Instituto Nacional de Pesquisas Espaciais, Laboratorio Associado de Plasma, Sao Jose dos Campos, Sao Paulo. Brasil
Year:
Season: Dic
Volumen: 34
Number: 4B
Pages: 1565-1571
Country: Brasil
Language: Inglés
Document type: Artículo
Approach: Analítico, descriptivo
English abstract The treatment of surfaces by plasma immersion ion implantation requires pulsed power modulators to provide negative high voltage pulses. To achieve this requirement, we have developed three basic circuit configurations in our laboratory: pulse forming network (PFN), hard-tube pulser (HT) and Blumlein line. In this paper we discuss these three types of circuit topologies.As experimental results, first we present the voltage/current characteristic waveforms of PFN and HT pulsers in the PIII treatment of different materials (aluminum, silicon and stainless steel) as well we describe the surface characterization of the materials thereof treated.And finally,we show recent high voltage tests of a high voltage Blumlein pulser (150kV/300A/1mus) to be used in surface treatments of polymers and aluminum alloys
Disciplines: Física y astronomía
Keyword: Teoría cinética y plasmas,
Moduladores de poder pulsado,
Implantación de iones,
Topologías de circuito,
Pulsor de Blumlein
Keyword: Physics and astronomy,
Kinetic theory and plasma,
Pulsed power modulators,
Ion implantation,
lCircuit topology,
Blumlein pulser
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