Pulsed Power Modulators for Surface Treatment by Plasma Immersion Ion Implantation



Título del documento: Pulsed Power Modulators for Surface Treatment by Plasma Immersion Ion Implantation
Revista: Brazilian journal of physics
Base de datos: PERIÓDICA
Número de sistema: 000248460
ISSN: 0103-9733
Autores: 1

Instituciones: 1Instituto Nacional de Pesquisas Espaciais, Laboratorio Associado de Plasma, Sao Jose dos Campos, Sao Paulo. Brasil
Año:
Periodo: Dic
Volumen: 34
Número: 4B
Paginación: 1565-1571
País: Brasil
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Analítico, descriptivo
Resumen en inglés The treatment of surfaces by plasma immersion ion implantation requires pulsed power modulators to provide negative high voltage pulses. To achieve this requirement, we have developed three basic circuit configurations in our laboratory: pulse forming network (PFN), hard-tube pulser (HT) and Blumlein line. In this paper we discuss these three types of circuit topologies.As experimental results, first we present the voltage/current characteristic waveforms of PFN and HT pulsers in the PIII treatment of different materials (aluminum, silicon and stainless steel) as well we describe the surface characterization of the materials thereof treated.And finally,we show recent high voltage tests of a high voltage Blumlein pulser (150kV/300A/1mus) to be used in surface treatments of polymers and aluminum alloys
Disciplinas: Física y astronomía
Palabras clave: Teoría cinética y plasmas,
Moduladores de poder pulsado,
Implantación de iones,
Topologías de circuito,
Pulsor de Blumlein
Keyword: Physics and astronomy,
Kinetic theory and plasma,
Pulsed power modulators,
Ion implantation,
lCircuit topology,
Blumlein pulser
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