Ion beam analyses in titanium nitride technology
Document title: Ion beam analyses in titanium nitride technology
Journal: Brazilian journal of physics
Database: PERIÓDICA
System number: 000003193
ISSN: 0103-9733
Authors: 1
Institutions: 1Universidade Federal do Rio Grande do Sul, Instituto de Física, Porto Alegre, Rio Grande do Sul. Brasil
Year:
Season: Sep
Volumen: 23
Number: 3
Pages: 243-252
Country: Brasil
Language: Inglés
Document type: Artículo
Approach: Analítico
Disciplines: Física y astronomía
Keyword: Física atómica y molecular,
Física de materia condensada,
Iones,
Cubiertas,
Haz-analisis,
Películas delgadas
Keyword: Physics and astronomy,
Atomic and molecular physics,
Condensed matter physics,
Ions,
Coatings,
Thin films,
Beam analysis
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