Effects of carbon on dynamic annealing and on electrical activation of dopants in silicon substrate
Document title: Effects of carbon on dynamic annealing and on electrical activation of dopants in silicon substrate
Journal: Brazilian journal of physics
Database: PERIÓDICA
System number: 000005194
ISSN: 0103-9733
Authors: 1
Institutions: 1Universidade Federal do Rio Grande do Sul, Instituto de Física, Porto Alegre, Rio Grande do Sul. Brasil
Year:
Season: Jun
Volumen: 24
Number: 2
Pages: 538-542
Country: Brasil
Language: Inglés
Document type: Artículo
Approach: Analítico
Disciplines: Física y astronomía
Keyword: Física atómica y molecular,
Física de materia condensada,
Silicio,
Carbono,
Dopantes,
Cristales,
Implantación,
Activación eléctrica
Keyword: Physics and astronomy,
Atomic and molecular physics,
Condensed matter physics,
Carbon,
Silicon,
Dopants,
Crystals,
Implantation,
Electrical activation
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