Corrosion resistance and biocompatibility of zirconium oxynitride thin film growth by rf sputtering



Título del documento: Corrosion resistance and biocompatibility of zirconium oxynitride thin film growth by rf sputtering
Revue: Revista mexicana de física
Base de datos: PERIÓDICA
Número de sistema: 000361014
ISSN: 0035-001X
Autores: 1
2
3
4
5
Instituciones: 1Universidad Nacional de Colombia, Departamento de Química, Bogotá. Colombia
2Universidad Nacional de Colombia, Facultad de Ingeniería, Bogotá. Colombia
3Universidad Nacional de Colombia, Facultad de Medicina, Bogotá. Colombia
4Universidad Nacional de Colombia, Departamento de Física, Bogotá. Colombia
5Universidad de Cádiz, Departamento de Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica, Cádiz. España
Año:
Periodo: Ago
Volumen: 58
Número: 4
Paginación: 328-334
País: México
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Analítico, teórico
Resumen en inglés Thin films of zirconium oxynitride were grown on common glass, silicon (100) and stainless steel 316 L substrates using the reactive rf magnetron sputtering technique. The films were analyzed through structural, morphological, and biocompatibility studies. The structural analysis was carried out using X-ray diffraction (XRD), and the morphological analysis was carried out using scanning electron microscopy (SEM) and atomic force microscopy (AFM). These studies were done as a function of growth parameters, such as power applied to the target, substrate temperature, and flow ratios. The corrosion resistance studies were made on samples of stainless steel 316 L coated and uncoated with ZrxNyO films, through of polarization curves. The studies of biocompatibility were carried out on zirconium oxynitride films deposited on stainless steel 316L through proliferation and cellular adhesion. The XRD analysis shows that films deposited at 623 K, with a flow ratio ΦN2/ΦO2 of 1.25 and a total deposit time of 30 minutes grew preferentially oriented along the (111) plane of the zirconium oxyitride monoclinic phase. The SEM analyses showed that the films grew homogenously, and the AFM studies indicated that the average rugosity of the film was 5.9 nm and the average particle size was 150 nm. The analysis of the corrosion resistant, shows that the stainless steel coated with the film was increased a factor 10. Finally; through the analysis of the biocompatibility we established that the films have a better surface than the substrate (stainless steel 316 L) in terms of the adhesion and proliferation of bone cells
Disciplinas: Física y astronomía,
Ingeniería
Palabras clave: Física de materia condensada,
Ingeniería de materiales,
Películas delgadas,
Células óseas,
Biocompatibilidad,
Oxido de circonio
Keyword: Physics and astronomy,
Engineering,
Condensed matter physics,
Materials engineering,
Thin films,
Bone cells,
Biocompatibility,
Zirconium oxide
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