An empirical model for the Backscattering coefficient of 1-30 keV electrons from thin film targets



Título del documento: An empirical model for the Backscattering coefficient of 1-30 keV electrons from thin film targets
Revista: Revista mexicana de física
Base de datos: PERIÓDICA
Número de sistema: 000460658
ISSN: 0035-001X
Autores: 1
2
3
4
3
5
Instituciones: 1Universite Ferhat Abbas, Faculte des Sciences, Setif. Argelia
2Universite Mohamed El Bachir El Ibrahimi, Laboratoire Caracterisation et Valorisation des Ressources Naturelles, Bordj-Bou Arréridj. Argelia
3Universite Batna 2, Department of Electronics, Batna. Argelia
4Universite Mohamed El Bachir El Ibrahimi, Laboratoire Materiaux et Systemes Electroniques, Bordj-Bou Arréridj. Argelia
5Centre de Recherche Nucleaire d’Alger, Argel. Argelia
Año:
Periodo: Jul-Ago
Volumen: 68
Número: 4
País: México
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Analítico, teórico
Resumen en inglés In this paper, the electron backscattering coefficient for normally incident beams with energy up to 30 keV impinging on thin film targets is stochastically modeled using a Monte Carlo simulation. Accordingly, a generalized model describing the realistic backscattering behavior taking into account both the atomic number and the thickness for energy up to 30 keV is proposed. The obtained results are compared to the experimental and theoretical data, where an excellent agreement is achieved. Moreover, the usefulness of the proposed model as a probe for investigating the electrons backscattered behavior of several materials is thoroughly discussed. It is revealed that the developed model allows identifying the critical thickness of thin film exhibiting the same electron backscattering behavior as that of a semi-infinite solid, which contributes to an accurate assessment of surface properties of various thin-films. The use of our empirical model enables reducing the simulation time as compared to that of complicated Monte Carlo time consuming simulation. Therefore, the presented model can be implemented to accurately determinate the electron backscattering coefficient of various thin-film materials with dissimilar thicknesses, making it appropriate for surface analysis applications
Disciplinas: Física y astronomía
Palabras clave: Física,
Monte Carlo,
Coeficiente de retrodispersión,
Películas delgadas
Keyword: Physics,
Monte Carlo calculations,
Backscattering coefficient,
Thin films
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