| Revue: | Materials research |
| Base de datos: | PERIÓDICA |
| Número de sistema: | 000312728 |
| ISSN: | 1516-1439 |
| Autores: | Santos, Deborah Cristina Ribeiro dos1 Rangel, Rita de Cassia Cipriano Mota, Rogerio Pinto Cruz, Nilson Cristino da Rangel, Elidiane Cipriano Schreiner, Wido Herwig2 |
| Instituciones: | 1Universidade Estadual Paulista "Julio de Mesquita Filho", Departamento de Fisica e Quimica, Guaratingueta, Sao Paulo. Brasil 2Universidade Federal do Parana, Departamento de Fisica, Curitiba, Parana. Brasil |
| Año: | 2004 |
| Periodo: | Jul-Sep |
| Volumen: | 7 |
| Número: | 3 |
| Paginación: | 493-497 |
| País: | Brasil |
| Idioma: | Inglés |
| Tipo de documento: | Nota breve o noticia |
| Enfoque: | Experimental |
| Resumen en inglés | In this work, thin polymer films were prepared from acetylene and argon radiofrequency (13.56 MHz, 80 W) glow discharges. Post-deposition treatment was performed by plasma immersion ion implantation in nitrogen or helium glow discharges (13.56 MHz, 70 W). In these cases, samples were biased with 25 kV negative pulses. Exposure time to the bombardment plasma, t, ranged from 900 to 7200 s. Chemical composition of the film surfaces was investigated by X-ray Photoelectron Spectroscopy and the resistance to oxidation by the etching process, in reactive oxygen plasmas. Oxygen and nitrogen were detected in all the samples. While the concentration of the former continuously changed with t, that of N kept practically constant in small proportions. The film is predominantly formed by sp² states, but the proportion of sp³ hybridization slightly increased with t. The etching rate dropped under certain conditions of nitrogen bombardment whereas helium implantation has not significantly improved it. These results are ascribed to the crosslinking degree of the polymeric chains, ruled by the total amount of energy delivered to the film |
| Disciplinas: | Ingeniería, Química, Física y astronomía |
| Palabras clave: | Ingeniería de materiales, Química de polímeros, Teoría cinética y plasmas, Películas delgadas, Resistencia, Oxidación, Espectroscopía |
| Keyword: | Engineering, Chemistry, Physics and astronomy, Materials engineering, Polymer chemistry, Kinetic theory and plasma, Thin films, Resistance, Oxidation, Spectroscopy |
| Texte intégral: | Texto completo (Ver HTML) |
