Fully solution-processed zinc oxide MIS capacitors by ultrasonic spray pyrolysis in air ambient



Título del documento: Fully solution-processed zinc oxide MIS capacitors by ultrasonic spray pyrolysis in air ambient
Revue: Journal of applied research and technology
Base de datos: PERIÓDICA
Número de sistema: 000427955
ISSN: 1665-6423
Autores: 1
2
Instituciones: 1Benemérita Universidad Autónoma de Puebla, Instituto de Ciencias, Puebla. México
2Instituto Politécnico Nacional, Centro de Investigación en Biotecnología Aplicada, Tlaxcala. México
Año:
Periodo: Jun
Volumen: 15
Número: 3
País: México
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Aplicado, descriptivo
Resumen en inglés In this work, the fabrication and characterization of fully solution-processed zinc oxide metal-insulator-semiconductor (MIS) capacitors by ultrasonic spray pyrolysis (USP) are presented. Fluorine tin oxide by USP was used as transparent electrode, while spin-on glass by spin-coating was used as dielectric and zinc oxide by USP was used as active layer. Also, the zinc oxide film was characterized using photoluminescence spectroscopy, X-ray diffraction and Fourier transform infrared spectroscopy. The MIS capacitors were fabricated over glass slides and were highly transparent in the visible range, which makes their use feasible in transparent electronics. Employing capacitance-voltage and current-voltage measurements, the MIS capacitors were characterized
Disciplinas: Ingeniería
Palabras clave: Ingeniería electrónica,
Capacitores,
Oxido de zinc,
Semiconductores
Keyword: Electronic engineering,
Capacitors,
Zinc oxide,
Semiconductors
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