General method for thickness determination of thin backed films . New formulation of backscattering spectrometry



Document title: General method for thickness determination of thin backed films . New formulation of backscattering spectrometry
Journal: Revista mexicana de física
Database: PERIÓDICA
System number: 000015626
ISSN: 0035-001X
Authors: 1


Institutions: 1Instituto Nacional de Investigaciones Nucleares, México, Distrito Federal. México
Year:
Season: Ago
Volumen: 41
Number: 4
Pages: 507-523
Country: México
Language: Inglés
Document type: Artículo
Approach: Analítico
Disciplines: Ciencias de la computación,
Física y astronomía
Keyword: Física atómica y molecular,
Física de materia condensada,
Haces-carbon,
Espectrometría,
Retrodispersion,
Grosor-peliculas,
Películas delgadas
Keyword: Computer science,
Physics and astronomy,
Atomic and molecular physics,
Condensed matter physics,
Thin films,
Spectrometry,
Carbon beams,
Film thickness,
Backscattering
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