Effects of the atmosphere and substrate on the crystallization of PLZT thin films



Document title: Effects of the atmosphere and substrate on the crystallization of PLZT thin films
Journal: Materials research
Database: PERIÓDICA
System number: 000312441
ISSN: 1516-1439
Authors: 1



2
Institutions: 1Universidade Estadual Paulista "Julio de Mesquita Filho", Instituto de Quimica, Araraquara, Sao Paulo. Brasil
2University of Belgrade, Belgrado. Serbia
Year:
Season: Jul
Volumen: 3
Number: 3
Pages: 68-73
Country: Brasil
Language: Inglés
Document type: Artículo
Approach: Descriptivo
English abstract Lead lanthanum zirconate titanate [PLZT (9/65/35)] thin films were prepared by dip-coating on Si (100) or Si/Ti/Pt (100) substrates using a polymeric precursor solution and annealed at 650 °C for 3 h. Perovskite phase formation of the PLZT thin films and microstructure were analysed using XRD and SEM. Effects of Si (100), Si/Ti/Pt (100) substrates and atmosphere on crystallization of PLZT thin films were studied. Films deposited on platinum coated silicon (100) show a heterogeneous surface with presence of bubbles. Otherwise, the PLZT (9/65/35) thin films deposited on silicon (100) substrate shows a more uniform surface after annealing in oxygen atmosphere
Disciplines: Química,
Ingeniería
Keyword: Química de polímeros,
Ingeniería de materiales,
Método de Pechini,
Cristalización,
Películas delgadas,
Microestructuras
Keyword: Chemistry,
Engineering,
Polymer chemistry,
Materials engineering,
Pechini method,
Crystallization,
Thin films,
Microstructures
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