| Revista: | Superficies y vacío |
| Base de datos: | PERIÓDICA |
| Número de sistema: | 000404805 |
| ISSN: | 1665-3521 |
| Autores: | Elyukhin, V.A1 Peña Sierra, R1 García Salgado, G2 |
| Instituciones: | 1Instituto Politécnico Nacional, Centro de Investigación y de Estudios Avanzados, México, Distrito Federal. México 2Benemérita Universidad Autónoma de Puebla, Centro de Investigación en Dispositivos Semiconductores, Puebla. México |
| Año: | 2004 |
| Periodo: | Jun |
| Volumen: | 17 |
| Número: | 2 |
| Paginación: | 25-28 |
| País: | México |
| Idioma: | Inglés |
| Tipo de documento: | Artículo |
| Enfoque: | Analítico |
| Resumen en inglés | The thermodynamic models of the molecular beams currently used in the MBE systems are developed. The main difference with respect to traditional thermodynamic models resides on the consideration of physical behavior of the molecules of the beams. Usually the beams are considered as particles in a vapor phase, with three translational degrees of freedom. However the molecular beams emerging from the conventional and Knudsen effusion cells have different behavior. In the developed models, the beams emerged from the conventional cells as well as desorbed fluxes in the molecular beam epitaxy are considered as canonical ensembles of the one-dimensional ideal gas moving in a given direction. The thermodynamic characteristics of the molecules in the beams emerging from the cracking and Knudsen effusion cells are described by the velocity distribution law. These differences impact on the results of the thermodynamic models as compared with those in the literature. In this work the chemical potential of the conventional effusion and the Knudsen effusion cells considering their own characteristics are shown |
| Disciplinas: | Física y astronomía, Ingeniería |
| Palabras clave: | Física de materia condensada, Termodinámica y física estadística, Ingeniería de materiales, Termodinámica, Haces moleculares, Epitaxia, Películas delgadas, Estado sólido, Crecimiento de cristales, Células de Knudsen |
| Keyword: | Physics and astronomy, Engineering, Condensed matter physics, Physics, Thermodynamics and statistical physics, Materials engineering, Thermodynamics, Molecular beams, Epitaxy, Thin films, Solid state, Crystal growth, Knudsen cells |
| Texto completo: | Texto completo (Ver PDF) |
