Quantification of phase content in TiO2 thin films by Raman spectroscopy



Título del documento: Quantification of phase content in TiO2 thin films by Raman spectroscopy
Revista: Superficies y vacío
Base de datos: PERIÓDICA
Número de sistema: 000387309
ISSN: 1665-3521
Autores: 1
2
1
Instituciones: 1Universidad Autónoma del Estado de México, Facultad de Química, Toluca, Estado de México. México
2Instituto Nacional de Investigaciones Nucleares, Departamento de Física, México, Distrito Federal. México
Año:
Periodo: Sep
Volumen: 27
Número: 3
Paginación: 88-92
País: México
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Experimental, aplicado
Resumen en inglés Recently, it has been reported that TiO2 with mixture of phases (anatase/rutile) exhibit higher photocatalytic activity than TiO2 with pure anatase phase. Therefore, the production and correct quantification of the ratio of phases becomes an important task. In this work, anatase TiO2 thin films were obtained by the DC reactive magnetron sputtering technique. TiO2 with mixture of phases (anatase/rutile) were prepared by thermal annealing of the as-deposited thin films. The value of the anatase/rutile ratio in the titanium dioxide thin films was estimated using Raman spectroscopy. Additionally, it is reported the dependence of the bandgap of the TiO2 thin films as a function of the anatase/rutile ratio. The band gap of the TiO2 thin films was determined from diffuse reflectance measurements
Disciplinas: Ingeniería
Palabras clave: Ingeniería de materiales,
Películas delgadas,
Oxido de titanio,
Mezcla de fases,
Anatasa,
Rutilo,
Espectroscopía Raman,
Erosión iónica reactiva
Keyword: Engineering,
Materials engineering,
Thin films,
Titanium oxide,
Mixture of phases,
Anatase,
Rutile,
Reactive sputtering,
Raman spectroscopy
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