Analysis of MEMS structures to identify their frequency response oriented to acoustic applications
Título del documento: Analysis of MEMS structures to identify their frequency response oriented to acoustic applications
Revista: Superficies y vacío
Base de datos: PERIÓDICA
Número de sistema: 000394780
ISSN: 1665-3521
Autores: 1
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Instituciones: 1Instituto Politécnico Nacional, Centro de Investigación y de Estudios Avanzados, Zapopan, Jalisco. México
2Universidad de Guadalajara, Centro Universitario de Ciencias Exactas e Ingenierías, Guadalajara, Jalisco. México
Año:
Periodo: Mar
Volumen: 28
Número: 1
Paginación: 12-17
País: México
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Experimental, analítico
Resumen en inglés Micro-ElectroMechanical Systems (MEMS) structures as well as all physical objects have a natural frequency or frequencies at which they react with a vibration. The natural frequencies depend on both the mass and rigidity of the structure. In this paper the frequency responses of some MEMS structures are analyzed based on the physical parameters of the materials. The design of the analyzed structures is aimed to identify the frequency components of a multi-tone acoustic signal. Specifically the designed structures are meant to be part of an electromechanical spectrum analyzer that emulates the behavior of a human cochlea. Harmonic analysis of the structures is carried out using ANSYS Workbench software. The importance of this work is to validate the use of ANSYS tools for the design of these devices, since for practical purposes the results are very accurate; however, the mathematical design can become very complex due to the geometry of the structures
Disciplinas: Física y astronomía
Palabras clave: Acústica,
Física,
Frecuencias naturales,
MEMS,
Sistemas microelectromecánicos,
Respuesta en frecuencia
Keyword: Physics and astronomy,
Acoustics,
Physics,
Natural frequencies,
MEMS,
Microelectromechanical systems,
Frequency response
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