Aluminium surface modification by nitrogen-argon mixture PIII



Título del documento: Aluminium surface modification by nitrogen-argon mixture PIII
Revista: Superficies y vacío
Base de datos: PERIÓDICA
Número de sistema: 000365815
ISSN: 1665-3521
Autores: 1
1
1
1
2
2
2
2
2
Instituciones: 1Instituto Tecnológico de Toluca, Toluca, Estado de México. México
2Instituto Nacional de Investigaciones Nucleares, México, Distrito Federal. México
Año:
Periodo: Jun
Volumen: 22
Número: 2
Paginación: 17-22
País: México
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Experimental, aplicado
Resumen en inglés Pure nitrogen, 30% argon/70% nitrogen, 50% argon/50% nitrogen, 70% argon/30% nitrogen plasma immersion ion implantation (PIII) processes onto aluminium samples has been performed at 2 to 6 kV negative bias and 50 to 150 us pulse widths, the sample temperature being established at 400 °C. Incident fluencies of ~1018 atoms/cm2 were used to investigate the diffusion behaviour and AlN phase formation in the samples. X–ray diffraction (XRD) shows the formation of the cubic phase of AlN with both pure nitrogen and all the mixtures whereas the hexagonal phase becomes apparent only in the 50% mixture and in pure nitrogen. The characteristic peak of AlN has also been determined by Raman spectroscopy. The microhardness was found to be always maximal with the 50% nitrogen 50% argon mixture
Disciplinas: Ingeniería,
Química
Palabras clave: Ingeniería de materiales,
Ingeniería química,
Aluminio,
Implantación de iones,
Dureza,
Difracción de rayos X,
Microscopía electrónica de barrido
Keyword: Engineering,
Chemistry,
Chemical engineering,
Materials engineering,
Aluminum,
Ion implantation,
Hardness,
X-ray diffraction,
Scanning electron microscopy
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