| Revista: | Brazilian journal of physics |
| Base de datos: | PERIÓDICA |
| Número de sistema: | 000336924 |
| ISSN: | 0103-9733 |
| Autores: | Canal, G.P1 Luna, H2 Ruchko, L.F3 Galvao, R.M.O1 |
| Instituciones: | 1Ministerio da Ciencia e Tecnologia, Centro Brasileiro de Pesquisas Fisicas, Rio de Janeiro. Brasil 2Universidade Federal do Rio de Janeiro, Instituto de Fisica, Rio de Janeiro. Brasil 3Universidade de Sao Paulo, Instituto de Fisica, Sao Paulo. Brasil |
| Año: | 2010 |
| Periodo: | Mar |
| Volumen: | 40 |
| Número: | 1 |
| Paginación: | 108-114 |
| País: | Brasil |
| Idioma: | Inglés |
| Tipo de documento: | Artículo |
| Enfoque: | Analítico, descriptivo |
| Resumen en inglés | The design and characterization of an innovative device for plasma cleaning, based upon a non-conventional radio-frequency discharge, is described. The RF fields are produced by an antenna placed inside the metallic vacuum chamber. Theoretical models are described to calculate both the electro-magnetic field structure and the spatial impurity distribution, due to erosion of the antenna. The electron energy distribution function is determined with a standard RF-filtered electrostatic probe; it is found that the plasma is well described by a Druyvesteyn energy distribution function |
| Disciplinas: | Física y astronomía |
| Palabras clave: | Teoría cinética y plasmas, Radiofrecuencia, Limpiador de plasma, Sonda de Langmuir |
| Keyword: | Physics and astronomy, Kinetic theory and plasma, Radiofrequency, Plasma cleaner, Langmuir probe |
| Texto completo: | Texto completo (Ver PDF) |
