Adherent diamond-like carbon coatings on metals via PECVD and IBAD



Título del documento: Adherent diamond-like carbon coatings on metals via PECVD and IBAD
Revista: Brazilian journal of physics
Base de datos: PERIÓDICA
Número de sistema: 000310521
ISSN: 0103-9733
Autores: 1
2


Instituciones: 1Instituto Nacional de Pesquisas Espaciais, Laboratorio Associado de Sensores e Materiais, Sao Jose dos Campos, Sao Paulo. Brasil
2Instituto Tecnologico de Aeronautica, Centro Tecnico Aeroespacial, Sao Jose dos Campos, Sao Paulo. Brasil
Año:
Periodo: Sep
Volumen: 36
Número: 3B
Paginación: 986-989
País: Brasil
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Experimental, aplicado
Resumen en inglés Adherent and low-stress a-C:H films were deposited on Ti6Al4V and stainless steel substrates using PECVD and IBAD techniques. An amorphous silicon interlayer was applied to improve the adhesion of the a-C:H films on the metal substrates. The XPS technique was employed to analyze the chemical bondings within the interfaces. The elemental composition and atomic density of the films were determined by ion beam analysis. The film microstructure was studied by means of Raman scattering spectroscopy. The mechanical properties were determined by means of stress and hardness measurements. The adherence was evaluated by means of scratch tests. The tests showed that the composition, the microstructure, and the mechanical properties of the films depend on the intensity of the ion bombardment and on the ion current
Disciplinas: Ingeniería
Palabras clave: Ingeniería de materiales,
Diamante,
Deposición química de vapor,
Haces de iones,
Recubrimientos
Keyword: Engineering,
Materials engineering,
Diamond,
Chemical vapor deposition,
Ion beams,
Coatings
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