"Ab initio" studies of hydrogen-enhanced oxygen diffusion in silicon



Título del documento: "Ab initio" studies of hydrogen-enhanced oxygen diffusion in silicon
Revista: Brazilian journal of physics
Base de datos: PERIÓDICA
Número de sistema: 000158902
ISSN: 0103-9733
Autores: 1
2
3
4
5
Instituciones: 1Universidade Federal do Rio de Janeiro, Instituto de Física, Rio de Janeiro. Brasil
2Universidade de Sao Paulo, Instituto de Física, Sao Paulo. Brasil
3Massachusetts Institute of Technology, Department of Materials Science and Engineering, Cambridge, Massachusetts. Estados Unidos de América
4Stanford University, Mechanical Engineering Department, Stanford, California. Estados Unidos de América
5Massachusetts Institute of Technology, Department of Physics, Cambridge, Massachusetts. Estados Unidos de América
Año:
Periodo: Dic
Volumen: 29
Número: 4
Paginación: 611-615
País: Brasil
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Analítico
Resumen en inglés A novel microscopic mechanism for hydrogen-enhanced oxygen diffusion in p-doped silicon is proposed. A path for joint diffusion of O and H is obtained from an ab-initio molecular dynamics "kick" simulation. The migration pathway consists of a two-step mechanism, with a maximum energy of 1.46 eV. This path represents a 0.54 eV reduction in the static barrier when compared with the diffusion of isolated O in Si, in excellent agreement with experiments
Disciplinas: Física y astronomía
Palabras clave: Física de materia condensada,
Semiconductores,
Silicio,
Difusión de oxígeno,
Dinámica molecular
Keyword: Physics and astronomy,
Condensed matter physics,
Semiconductors,
Silicon,
Oxygen diffusion,
Molecular dynamics
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