Dependence of crystalline, ferroelectric and fracture toughness on annealing in Pb(Zr0.52Ti0.48)O3 thin films deposited by metal organic decomposition



Título del documento: Dependence of crystalline, ferroelectric and fracture toughness on annealing in Pb(Zr0.52Ti0.48)O3 thin films deposited by metal organic decomposition
Revista: Materials research
Base de datos: PERIÓDICA
Número de sistema: 000312692
ISSN: 1516-1439
Autores: 1

Instituciones: 1Xiangtan University, Hunan. China
Año:
Periodo: Oct-Dic
Volumen: 6
Número: 4
Paginación: 551-556
País: Brasil
Idioma: Inglés
Tipo de documento: Nota breve o noticia
Enfoque: Experimental
Resumen en inglés Crystalline, electric and fracture properties of Pb(Zr0.52Ti0.48)O3 (PZT) thin films are strongly affected by annealing temperatures in rapid treatment annealing (RTA) of metal organic decomposition (MOD). X-ray diffraction (XRD), RT66A standard ferroelectric analyzer and Vickers indentation method were used to investigate the crystalline, ferroelectric and mechanical properties, respectively. PZT thin film with complete perovskite structure and best ferroelectric property can be obtained at 750 °C, however the fracture toughness was weaker than the thin films annealed at 600 °C and 650 °C. With the increase of annealing temperature from 600 °C to 750 °C, the remanent polarization and coercive field increased in the ranges 13.8~25.2 (µC/cm²) and 7.2~8.3 (kV/cm) respectively, while the fracture toughness of PZT thin films decreased from 0.49 MPam½ to 0.47 MPam½
Disciplinas: Ingeniería,
Física y astronomía
Palabras clave: Ingeniería de materiales,
Ingeniería mecánica,
Física de materia condensada,
Películas delgadas,
Plomo,
Propiedades eléctricas,
Fracturas,
Dureza,
Ferroeléctricos
Keyword: Engineering,
Physics and astronomy,
Materials engineering,
Mechanical engineering,
Condensed matter physics,
Thin films,
Lead,
Electrical properties,
Fractures,
Hardness,
Ferroelectrics
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