Investigation on diamond turning of silicon crystal - generation mechanism of surface cut with worn tool



Título del documento: Investigation on diamond turning of silicon crystal - generation mechanism of surface cut with worn tool
Revista: Journal of the Brazilian Society of Mechanical Sciences
Base de datos: PERIÓDICA
Número de sistema: 000312091
ISSN: 0100-7386
Autores: 1

Instituciones: 1Universidade de Sao Paulo, Departamento de Engenharia Mecanica, Sao Carlos, Sao Paulo. Brasil
Año:
Volumen: 23
Número: 2
Paginación: 241-252
País: Brasil
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Experimental
Resumen en inglés This paper discusses the effect of tool wear on surface finish in single-point diamond turning of single crystal silicon. The morphology and topography of the machined surface clearly show the type of cutting edge wear reproduced onto the cutting grooves. Scanning electron microscopy is used in order to correlate the cutting edge damage and microtopography features observed through atomic force microscopy. The possible wear mechanisms affecting tool performance and surface generation during cutting are also discussed. The zero degree rake angle single point diamond tool presented small nicks on the cutting edge. The negative rake angle tools presented more a type of crater wear on the rake face. No wear was detected on flank face of the diamond tools
Disciplinas: Ingeniería
Palabras clave: Equipo y maquinaria,
Ingeniería industrial,
Ingeniería mecánica,
Desgaste,
Diamante,
Maquinado,
Cristales,
Silicón,
Topografía,
Microscopía electrónica,
Microscopía de fuerza atómica
Keyword: Engineering,
Equipment and machinery,
Industrial engineering,
Mechanical engineering,
Wear,
Diamond,
Machining,
Crystals,
Silicon,
Electron microscopy,
Atomic force microscopy
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