| Revista: | Journal of applied research and technology |
| Base de datos: | PERIÓDICA |
| Número de sistema: | 000399637 |
| ISSN: | 1665-6423 |
| Autores: | Vázquez Cerón, E.R1 Barrales Guadarrama, V.R1 Rodríguez Rodríguez, E.M1 Barrales Guadarrama, R1 |
| Instituciones: | 1Universidad Autónoma Metropolitana, Azcapotzalco, Distrito Federal. México |
| Año: | 2007 |
| Periodo: | Ago |
| Volumen: | 5 |
| Número: | 2 |
| Paginación: | 113-118 |
| País: | México |
| Idioma: | Inglés |
| Tipo de documento: | Artículo |
| Enfoque: | Aplicado, descriptivo |
| Resumen en inglés | A methodology to improve the production and quality of deposited thin films has been developed for the PLD technique. The main purpose is the optimization of electrical and transport properties of the films through the characterization of growth parameters concerning some important characteristics of the material such as roughness, resistance, homogeneity, etc. It improves the production process of thin films, and it also decreases costs, conserving the quality at the same time. The use of interpolations and orthogonal arrangements allows to evaluate the growth parameters and to predict results eliminating the need to repeat experiments |
| Disciplinas: | Ingeniería |
| Palabras clave: | Ingeniería de materiales, Películas delgadas, Crecimiento, Propiedades eléctricas, Propiedades de transporte, Técnica de Taguchi |
| Keyword: | Engineering, Materials engineering, Thin films, Growth, Electrical properties, Transport properties, Taguchi technique |
| Texto completo: | Texto completo (Ver HTML) |
