XPS, AES and EELS study of the bonding character in CNx films



Título del documento: XPS, AES and EELS study of the bonding character in CNx films
Revista: Superficies y vacío
Base de datos: PERIÓDICA
Número de sistema: 000404704
ISSN: 1665-3521
Autors: 1
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Institucions: 1Universidad Nacional Autónoma de México, Centro de Ciencias de la Materia Condensada, Ensenada, Baja California. México
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Període: Dic
Volum: 15
Paginació: 34-39
País: México
Idioma: Inglés
Tipo de documento: Artículo
Enfoque: Analítico
Resumen en inglés We discuss the possibility of using photoemitted electrons corresponding to carbon 1s, in order to resolve the chemical state and the hybridization character of carbon in amorphous carbon nitride films (a-CNx). A series of carbon nitride films were prepared at room temperature by ablating a graphite target in a background of molecular nitrogen in the pressure range from high vacuum to 500 mTorr. The films were analyzed by means of XPS, EELS and AES. XPS results show the existence of two predominant binding states for both, nitrogen and carbon. The effect of heat treatment is to decrease the nitrogen content in the films, and the sharpening of the binding configuration of carbon. EELS results indicate that the films have predominantly sp 2 -hybridized carbon, before and after heat treatment, and no evidence of carbon in the sp 3 configuration was found. Thereupon, we conclude that it is not feasible to determine the hybridization state for carbon from XPS measurements alone, and that the nitrogen and carbon are co-existent in a polymer-like film
Disciplines Física y astronomía,
Ingeniería
Paraules clau: Física de materia condensada,
Ingeniería de materiales,
Refractarios,
Cerámica,
Depósito por láser pulsado,
Ablación,
Películas delgadas,
Carbón,
Nitrógeno,
Espectroscopía fotoelectrónica de rayos X
Keyword: Physics and astronomy,
Engineering,
Condensed matter physics,
Materials engineering,
Refractories,
Ceramics,
Pulsed laser deposition,
Ablation,
Thin films,
Carbon,
Nitrogen,
X-ray photoelectron spectroscopy
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