| Revista: | Superficies y vacío |
| Base de datos: | PERIÓDICA |
| Número de sistema: | 000396210 |
| ISSN: | 1665-3521 |
| Autors: | Herrera May, A.L1 Martínez Castillo, J1 García Ramírez, P.J1 Morales González, E2 Ramírez Treviño, A3 |
| Institucions: | 1Universidad Veracruzana, Centro de Investigación en Micro y Nanotecnología, Boca del Río, Veracruz. México 2Universidad Veracruzana, Facultad de Ingeniería, Boca del Río, Veracruz. México 3Instituto Politécnico Nacional, Centro de Investigación y de Estudios Avanzados, Zapopan, Jalisco. México |
| Any: | 2006 |
| Període: | Sep |
| Volum: | 19 |
| Número: | 3 |
| Paginació: | 20-26 |
| País: | México |
| Idioma: | Inglés |
| Tipo de documento: | Artículo |
| Enfoque: | Analítico |
| Resumen en inglés | The structural and electro-thermal analysis of a resonant structure for a magnetic sensor based on MEMS technology is presented in this paper. The effect of squeeze-film damping is included by mean of a theoretical model and using finite element software. In addition, analysis of the dynamic torsional model of magnetic structure is realized. The design of resonant structure considers a hollow rectangular configuration with thin beams of 20μm of width and 1.50μm of thickness suspended over a cavity that takes advantage of the Lorentz force principle allowing the detection of magnetic fields at levels of tens Gauss. The analytical results and simulations with finite element indicate that the vertical displacement has a linear behavior with low power consumption and a maximum Von Mises stress of 20.22MPa with a peak to peak voltage of 2 V |
| Disciplines | Física y astronomía, Ciencia y tecnología |
| Paraules clau: | Electromagnetismo, Tecnología, Nanotecnología, Microelectrónica, Sistemas microelectromecánicos, Sensores magnéticos, Fuerza de Lorentz |
| Keyword: | Physics and astronomy, Science and technology, Electromagnetism, Technology, Nanotechnology, Microelectronics, Microelectromechanical systems, Magnetic sensors, Lorentz force |
| Text complet: | Texto completo (Ver PDF) |
