| Revista: | Superficies y vacío |
| Base de datos: | PERIÓDICA |
| Número de sistema: | 000404990 |
| ISSN: | 1665-3521 |
| Autors: | Camps, E1 Escobar Alarcón, L1 Espinoza, M.E1 Camacho López, M.A2 Rodil, S.E3 Muhl, S3 |
| Institucions: | 1Instituto Nacional de Investigaciones Nucleares, México, Distrito Federal. México 2Universidad Autónoma Metropolitana, Departamento de Física, Iztapalapa, Distrito Federal. México 3Universidad Nacional Autónoma de México, Instituto de Investigaciones en Materiales, México, Distrito Federal. México |
| Any: | 2003 |
| Període: | Dic |
| Volum: | 16 |
| Número: | 4 |
| Paginació: | 37-41 |
| País: | México |
| Idioma: | Inglés |
| Tipo de documento: | Artículo |
| Enfoque: | Analítico |
| Resumen en inglés | The plasma plume generated during laser ablation of a carbon target (graphite 99.99%), is characterized by means of Optical Emission Spectroscopy (OES) and the Langmuir probe technique. Both techniques allow the determination of the mean kinetic energy of ions present in the plasma. Besides that, information about the excited species and the plasma density is obtained. Ablation is carried out using a Nd:YAG laser operated at the fundamental frequency with laser fluences in the range of 2 to 6 J/cm2 . The main excited specie in the plasma is the C+ (299.26 and 426.7 nm). The kinetic energy of these ions can be varied from 100 eV up to 500 eV, as a function of the used fluence. The plasma density varies from 2 x 1012 cm-3 up to 9 x 1013 cm-3, depending on the fluence and on the target-probe distance. Different samples of amorphous carbon thin films were deposited using different plasma parameters. The films show a sp3 /sp2 ratio which depend on the plasma conditions: a higher ratio is obtained for high densities and medium ion kinetic energies (about 200 eV). A 60% sp3 content, in some samples, could be obtained in these experiments. The deposited films were analyzed using Raman spectroscopy and EELS |
| Disciplines | Física y astronomía, Ingeniería |
| Paraules clau: | Física de materia condensada, Ingeniería de materiales, Plasma, Películas delgadas, Carbono como diamante, Ablación láser, Espectroscopía Raman |
| Keyword: | Physics and astronomy, Engineering, Condensed matter physics, Materials engineering, Plasma, Thin films, Diamond-like carbon, Laser ablation, Raman spectroscopy |
| Text complet: | Texto completo (Ver PDF) |
