| Revista: | Journal of the Brazilian Society of Mechanical Sciences |
| Base de datos: | PERIÓDICA |
| Número de sistema: | 000312123 |
| ISSN: | 0100-7386 |
| Autores: | Shimokohbe, Akira1 |
| Instituciones: | 1Tokyo Institute of Technology, Precision and Intelligence Laboratory, Tokio. Japón |
| Año: | 2002 |
| Periodo: | Nov |
| Volumen: | 24 |
| Número: | 4 |
| Paginación: | 312-317 |
| País: | Brasil |
| Idioma: | Inglés |
| Tipo de documento: | Artículo |
| Enfoque: | Experimental |
| Resumen en inglés | Production machines for next generation LSIs such as 4G-DRAMs and for large liquid crystal displays such as 0.5mx0.5m size, and information equipment such as magnetic hard disks and DVDs must have the positioning accuracy of a nano-meter order. To realize such a high degree of the positioning accuracy, not only precision machine elements and mechanisms but also high precision sensors, actuators and controller design techniques becomes crucial. This paper introduces recent topics of precision positioning and motion control technology in Japan |
| Disciplinas: | Ingeniería, Ciencia y tecnología |
| Palabras clave: | Ingeniería de control, Ingeniería mecánica, Nanómetros, Máquinas de precisión, Posicionamiento |
| Keyword: | Engineering, Science and technology, Control engineering, Mechanical engineering, Precision positioning, Nanometers, Motion montrol |
| Texto completo: | Texto completo (Ver HTML) |
